
Sputtering onions
Paperback110 pagina’sEngels
Magnetron sputtering is a mature technique for the deposition of thin films, both at laboratory and industrial level. Conceptually, the technique is quite simple and the process can be summarized in a few lines. A gas discharge is ignited by the application of a high voltage between a cathode and an anode. To increase the ionization efficiency of the electrons emitted from the cathode, a magnetic field is generated by a set of magnets placed behind the cathode. The ions present in the plasma, bombard the cathode which results in the ejection or sputtering of atoms. These sputtered atoms condense on the vacuum chamber walls and on the substrate to form a thin film. Behind this apparent simplicity, a complex interplay between different physical and chemical processes is hidden. This is especially the case when a reactive gas is added to the discharge. This book does not discuss all these processes in detail but provides, through a series of images, an overview of them. The short description accompanying the image can serve as a starting point for a more in-depth study.
In het kort
ISBN-13
9789465315782
Uitgever
Verschenen
15 oktober 2025
Imprint
Druk
1
Bibliografisch
ISBN-139789465315782
Editie1
Druk1
TaalEngels eng
Pagina’s110
GeïllustreerdJa
Uitgave
UitgeverBrave New Books
ImprintBrave New Books
CB-relatie-id6421296
Verschenen15 oktober 2025
StatusOnbekend 00
BeschikbaarheidContact leverancier 99
Adviesprijs (incl. btw)€ 35,00
Vorm & inhoud
ProductvormPaperback BC
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Classificatie
NUR (hoofd)Natuurkunde algemeen 924
NUR (alle)924 Natuurkunde algemeen
Medewerkers
Auteur A01Diederik Depla
Herkomst
Werk-id (NSTC)501644751
MeldingBevestigd bij publicatie 03
Bijgewerkt6 augustus 2026
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